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12 Inch DSP Unloading St愛你ation

Equipment Name:12 Inch DSP 低理Unloading Station Equipme雜從nt Function： A.Prevent wafer小務 droping from the vacuum chuck. 票工B.Set the slot 頻呢information by MES commun說化ication automatically or manu照雨ally. The station學朋 can collect wafer aut子地omatically as ordered. C.Finish the 森外work by MES communication autom兵聽atically and make MES acco雜綠unt after the proc知明ess. D.Prevent 少信wafer slot mixin船制g. E.Prevent wafer cruching，reduce 是計wafer broken during t站靜he post process.
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Category
Semiconductor Cleaning
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