Equipment Name: Automatic爸吧 Silicon Wafer Inserting-cleaning All-i又物n-one Machine Devic們紅e Type: SG2Y40-11CH400P 謝路Functions and Features: 1. Inserting,但金cleaning,loading is truly rea林制lized automatic in this c對南leaning line.Wafer inserting,不金cassette loading知紙,empty cassette remov著站ing by manual is cancelled.Many labo老著r can be saved in the cle好畫aning phase and its clea要技ning efficiency is gre相電atly raised.The intensity of labor fo了工r operating is decreased largely. 2. T做線he double-heads insertin房訊g system is used in the machine and it文湖s efficiency is great多資ly raised. 3. Added th村知e function of fragm暗年ent wafer testing. 4. Used the技樂 through drying with energy麗厭-saving,the cleaning cost reduced grea務日tly. 5. Seamless joint議劇ed with the Metrology Sorter S機什ystem. 6. Reduced wafer fragment c照紙aused by manual operation.The finis東西hed product rate is greatly improved.到術 7. High automation,ea些村sy to operate,facilitates the da子西ily supervisory work and maint銀線enance. Cleaning Proce西大ss: Loading→automa拿器tic separating→f朋樂ragment wafer testing→automatic i樂議nserting→cassette開業 entered into the location of l內東oading for clea事一ning grabbed automat和個icly by mechanical ar雪身m→ultrasonic cleanin為線g→ultrasonic alkali很坐 cleaning→ultrasonic alka下農li cleaning→ultrasonic rin間亮sing→ultrasonic medicine clean關熱ing→ultrasonic rinsing→ultraso訊他nic rinsing→dehydrat我亮ing with slowly pulling→drying→dry鐘綠ing→automatic dischargin開光g→cassette enter學男ed into the loadin車樹g location of se兒謝perator machine grabbed 裡東automaticly by me間日chanical arm→automatic inspectin新服g wafer of seperator→e商樂mpty cassette entered into the lo藍離cation of rotary system gr制村abbed automaticly by mechanical arm女物→empty cassette entered into th費有e location of inserti術知ng